Core−Shell-Shaped Organic−Inorganic Hybrid as Pore Generator for Imprinting Nanopores in Organosilicate Dielectric Films
Hong-Ji, Chen, Meng, FuVolume:
40
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma062471x
Date:
March, 2007
File:
PDF, 662 KB
english, 2007