Product Volatilization as a Probe of the Physics and...

Journal of Physical Chemistry A 2002 / 10 Vol. 106; Iss. 42

Product Volatilization as a Probe of the Physics and Chemistry of Latent Image Formation in Chemically Amplified Resists †,‡

Hinsberg, W. D., Houle, F. A., Poliskie, G. M., Pearson, D., Sanchez, M. I., Ito, H.
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Volume:
106
Language:
english
Journal:
The Journal of Physical Chemistry A
DOI:
10.1021/jp0201332
Date:
October, 2002
File:
PDF, 302 KB
english, 2002
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