Supercritical fluid transport-chemical deposition of films

Supercritical fluid transport-chemical deposition of films

Hansen, Brian N., Hybertson, Brooks M., Barkley, Robert M., Sievers, Robert E.
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Volume:
4
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00022a003
Date:
July, 1992
File:
PDF, 2.20 MB
english, 1992
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