Photoreactive Chemisorbed Monolayer Suppressing Polymer Dewetting in Thermal Nanoimprint Lithography
Oda, Hirokazu, Ohtake, Tomoyuki, Takaoka, Toshiaki, Nakagawa, MasaruVolume:
25
Language:
english
Journal:
Langmuir
DOI:
10.1021/la900902f
Date:
June, 2009
File:
PDF, 3.91 MB
english, 2009