Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges
Schulze, J, Schüngel, E, Donkó, Z, Luggenhölscher, D, Czarnetzki, UVolume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/12/124016
Date:
March, 2010
File:
PDF, 610 KB
english, 2010