Phase resolved optical emission spectroscopy: a...

Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

Schulze, J, Schüngel, E, Donkó, Z, Luggenhölscher, D, Czarnetzki, U
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Volume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/12/124016
Date:
March, 2010
File:
PDF, 610 KB
english, 2010
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