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Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement
Yu, Haitao, Li, Xinxin, Gan, Xiaohua, Liu, Yongjing, Liu, Xiang, Xu, Pengcheng, Li, Jungang, Liu, MinVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/4/045023
Date:
April, 2009
File:
PDF, 465 KB
english, 2009