Optical mirror referenced capacitive flatness measurement...

Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages

Křen, Petr
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Volume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/4/044017
Date:
April, 2014
File:
PDF, 356 KB
english, 2014
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