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Dynamic Surface Site Activation: A Rate Limiting Process in Electron Beam Induced Etching
Martin, Aiden A., Phillips, Matthew R., Toth, MilosVolume:
5
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am402083n
Date:
August, 2013
File:
PDF, 1.64 MB
english, 2013