Atomic Layer Deposition of Titanium Dioxide Thin Films from...

The Journal of Physical Chemistry C 2009 / 12 Vol. 113; Iss. 52

Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe) 3 and Ozone

Rose, Martin, Niinistö, Jaakko, Michalowski, Pawel, Gerlich, Lukas, Wilde, Lutz, Endler, Ingolf, Bartha, Johann W.
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Volume:
113
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp907940u
Date:
December, 2009
File:
PDF, 459 KB
english, 2009
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