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Spatiotemporal optical emission spectroscopy of rf discharges in SF6
Petrović, Zoran Lj., Tochikubo, Fumiyoshi, Kakuta, Shigeru, Makabe, ToshiakiVolume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353118
File:
PDF, 1.47 MB
english, 1993