Fabrication of Size-Tunable Large-Area Periodic Silicon...

Journal of Physical Chemistry B 2003 / 09 Vol. 107; Iss. 37

Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution

Kuo, Chun-Wen, Shiu, Jau-Ye, Chen, Peilin, Somorjai, Gabor A.
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Volume:
107
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp035468d
Date:
September, 2003
File:
PDF, 384 KB
english, 2003
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