![](/img/cover-not-exists.png)
Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution
Kuo, Chun-Wen, Shiu, Jau-Ye, Chen, Peilin, Somorjai, Gabor A.Volume:
107
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp035468d
Date:
September, 2003
File:
PDF, 384 KB
english, 2003