Chemical vapor deposition of thin films of ruthenium and formation of an unexpected byproduct using hexafluoro-2-butynetetracarbonylruthenium(0)
Senzaki, Yoshihide, McCormick, Fred B., Gladfelter, Wayne L.Volume:
4
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00022a002
Date:
July, 1992
File:
PDF, 971 KB
english, 1992