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In situ Si flux cleaning technique for producing atomically...

In situ Si flux cleaning technique for producing atomically flat Si(100) surfaces at low temperature

G. D. Wilk, Y. Wei, H. Edwards, R. M. Wallace
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Volume:
70
Year:
1997
Language:
english
DOI:
10.1063/1.119083
File:
PDF, 695 KB
english, 1997
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