Atomic Layer Deposition of TiO 2 and ZrO 2 Thin Films Using Heteroleptic Guanidinate Precursors
Kaipio, Mikko, Blanquart, Timothee, Banerjee, Manish, Xu, Ke, Niinistö, Jaakko, Longo, Valentino, Mizohata, Kenichiro, Devi, Anjana, Ritala, Mikko, Leskelä, MarkkuVolume:
20
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201407115
Date:
September, 2014
File:
PDF, 1.09 MB
english, 2014