Stress mapping of micromachined polycrystalline silicon...

Applied Physics Letters 2014 / 05 Vol. 104; Iss. 19

Stress mapping of micromachined polycrystalline silicon devices via confocal Raman microscopy

Myers, Grant A., Hazra, Siddharth S., de Boer, Maarten P., Michaels, Chris A., Stranick, Stephan J., Koseski, Ryan P., Cook, Robert F., DelRio, Frank W.
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Volume:
104
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4878616
Date:
May, 2014
File:
PDF, 1.32 MB
english, 2014
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