Spectroscopic Characterization of the Atomic Hydrogen...

Spectroscopic Characterization of the Atomic Hydrogen Energies and Densities and Carbon Species during Helium−Hydrogen−Methane Plasma CVD Synthesis of Diamond Films

Mills, Randell, Sankar, Jayasree, Ray, Paresh, Dhandapani, Bala, He, Jiliang
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Volume:
15
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm020817m
Date:
March, 2003
File:
PDF, 234 KB
english, 2003
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