UV-LIGA microfabrication of 220 GHz sheet beam amplifier...

Journal of Micromechanics and Microengineering 2010 / 12 Vol. 20; Iss. 12

UV-LIGA microfabrication of 220 GHz sheet beam amplifier gratings with SU-8 photoresists

Joye, Colin D, Calame, Jeffrey P, Garven, Morag, Levush, Baruch
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/12/125016
Date:
December, 2010
File:
PDF, 2.18 MB
english, 2010
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