Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH 4 /H 2 discharges
Strahm, B, Howling, A A, Sansonnens, L, Hollenstein, ChVolume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/1/011
Date:
February, 2007
File:
PDF, 319 KB
english, 2007