XPS and 19 F NMR Study of the...

Macromolecules 2005 / 05 Vol. 38; Iss. 10

XPS and 19 F NMR Study of the Photodegradation at 157 nm of Photolithographic-Grade Teflon AF Thin Films

Blakey, Idriss, George, Graeme A., Hill, David J. T., Liu, Heping, Rasoul, Firas, Whittaker, Andrew K., Zimmerman, Paul
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Volume:
38
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma047436+
Date:
May, 2005
File:
PDF, 104 KB
english, 2005
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