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Two-Stage Atomic Layer Deposition of Aluminum Oxide on Alkanethiolate Self-Assembled Monolayers Using n -Propanol and Water as Oxygen Sources
Kobayashi, Nobuhiko P., Williams, R. StanleyVolume:
20
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm702848y
Date:
August, 2008
File:
PDF, 272 KB
english, 2008