Immersion Deposition of Metal Films on Silicon and...

Chemistry of Materials 2003 / 01 Vol. 15; Iss. 1

Immersion Deposition of Metal Films on Silicon and Germanium Substrates in Supercritical Carbon Dioxide

Ye, Xiang R., Wai, Chien M., Zhang, Daqing, Kranov, Yanko, McIlroy, David N., Lin, Yuehe, Engelhard, Mark
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm011534h
Date:
January, 2003
File:
PDF, 372 KB
english, 2003
Conversion to is in progress
Conversion to is failed