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Epitaxial Growth of m -Plane ZnO Thin Films on (101̅0) Sapphire Substrate by Atomic Layer Deposition with Interrupted Flow
Ku, Ching-Shun, Lee, Hsin-Yi, Huang, Jheng-Ming, Lin, Chih-MingVolume:
10
Language:
english
Journal:
Crystal Growth & Design
DOI:
10.1021/cg9013043
Date:
April, 2010
File:
PDF, 2.74 MB
english, 2010