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Low-Temperature OMCVD of InN Thin Films from the Novel Air-Stable Single-Molecule Precursor Azido{bis[(3-dimethylamino)propyl]}indium, (N 3 )In[(CH 2 ) 3 NMe 2 ] 2
Fischer, Roland A., Miehr, Alexander, Metzger, Thomas, Born, Eberhard, Ambacher, Oliver, Angerer, Helmut, Dimitrov, RomanVolume:
8
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm9600642
Date:
January, 1996
File:
PDF, 214 KB
english, 1996