Structure versus Thermal Stability: The Periodic Structure of Atomic Layer Deposition-Grown Al-Incorporated HfO 2 Films and Its Effects on Amorphous Stabilization
Wang, Tuo, Ekerdt, John G.Volume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm102057d
Date:
April, 2011
File:
PDF, 2.01 MB
english, 2011