Structural and electrical damage induced by high-energy heavy ions in SiO2/Si structures
Busch, M. C., Slaoui, A., Siffert, P., Dooryhee, E., Toulemonde, M.Volume:
71
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.351078
File:
PDF, 1.01 MB
english, 1992