Dislocation Revelation for 4H-SiC by Using Vaporized NaOH:...

Materials Science Forum 2014 / 2 Vol. 778-780

Dislocation Revelation for 4H-SiC by Using Vaporized NaOH: A Possible Way to Distinguish Edge, Screw and Mixed Threading Dislocations by Etch Pit Method

Yao, Yong Zhao, Ishikawa, Yukari, Sugawara, Yoshihiro, Sato, Koji, Danno, Katsunori, Suzuki, Hiroshi, Sakamoto, Hidemitsu, Bessho, Takeshi, Yamaguchi, Satoshi, Nishikawa, Koichi
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Volume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.778-780.346
Date:
February, 2014
File:
PDF, 911 KB
english, 2014
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