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Advanced FIB sample preparation techniques for high resolution TEM investigations of HEMT structures
Simon-Najasek, Michél, Huebner, Susanne, Altmann, Frank, Graff, AndreasVolume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.07.101
Date:
September, 2014
File:
PDF, 2.12 MB
english, 2014