[IEEE 2007 IEEE Pulsed Power Plasma Science Conference - Albuquerque, NM, USA (2007.06.17-2007.04.22)] 2007 IEEE Pulsed Power Plasma Science Conference - Breakdown Conditions of Local Sheath Discharge in Front of Positively Biased Electrode Immersed in Inductively Coupled Plasma
Park, Yeong-Shin, Chung, Kyoung-Jae, Hwang, Y.S.Year:
2007
Language:
english
DOI:
10.1109/PPPS.2007.4345475
File:
PDF, 42 KB
english, 2007