Insolubilization mechanism of a chemical amplification...

Chemistry of Materials 1991 / 07 Vol. 3; Iss. 4

Insolubilization mechanism of a chemical amplification negative-resist system utilizing an acid-catalyzed silanol condensation reaction

Shiraishi, Hiroshi, Fukuma, Emiko, Hayashi, Nobuaki, Tadano, Keiko, Ueno, Takumi
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Volume:
3
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00016a012
Date:
July, 1991
File:
PDF, 1.04 MB
english, 1991
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