Measurements of the Reaction−Diffusion Front of Model...

Macromolecules 2006 / 11 Vol. 39; Iss. 24

 Measurements of the Reaction−Diffusion Front of Model Chemically Amplified Photoresists with Varying Photoacid Size ‖

Vogt, Bryan D., Kang, Shuhui, Prabhu, Vivek M., Lin, Eric K., Satija, Sushil K., Turnquest, Karen, Wu, Wen-li
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Volume:
39
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma061209l
Date:
November, 2006
File:
PDF, 171 KB
english, 2006
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