Metal-Organic Chemical Vapor Deposition of...

Chemistry of Materials 1994 / 10 Vol. 6; Iss. 10

Metal-Organic Chemical Vapor Deposition of Copper-Containing Phases: Kinetics and Reaction Mechanisms

Condorelli, Guglielmo G., Malandrino, Graziella, Fragala, Ignazio
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Volume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00046a048
Date:
October, 1994
File:
PDF, 1.53 MB
english, 1994
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