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Size Dependent Effects in Nucleation of Ru and Ru Oxide Thin Films by Atomic Layer Deposition Measured by Synchrotron Radiation X-ray Diffraction
Methaapanon, Rungthiwa, Geyer, Scott M., Brennan, Sean, Bent, Stacey F.Volume:
25
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm401585k
Date:
September, 2013
File:
PDF, 594 KB
english, 2013