A capacitive CMOS–MEMS sensor designed by multi-physics...

Japanese Journal of Applied Physics 2014 / 01 Vol. 53; Iss. 4S

A capacitive CMOS–MEMS sensor designed by multi-physics simulation for integrated CMOS–MEMS technology

Konishi, Toshifumi, Yamane, Daisuke, Matsushima, Takaaki, Masu, Kazuya, Machida, Katsuyuki, Toshiyoshi, Hiroshi
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.04EE15
Date:
January, 2014
File:
PDF, 1.61 MB
english, 2014
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