Particle Simulations of Sheath Dynamics in Low-Pressure...

Japanese Journal of Applied Physics 2011 / 8 Vol. 50; Iss. 8

Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges

Takao, Yoshinori, Matsuoka, Kenji, Eriguchi, Koji, Ono, Kouichi
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08JC02
Date:
August, 2011
File:
PDF, 1.35 MB
english, 2011
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