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Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges
Takao, Yoshinori, Matsuoka, Kenji, Eriguchi, Koji, Ono, KouichiVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08JC02
Date:
August, 2011
File:
PDF, 1.35 MB
english, 2011