Nonlinear Model Identification for Temperature Control in...

Industrial & Engineering Chemistry Research 2008 / 07 Vol. 47; Iss. 14

Nonlinear Model Identification for Temperature Control in Single Wafer Rapid Thermal Processing

Cho, Wonhui, Edgar, Thomas F., Lee, Jietae
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Volume:
47
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/ie071378+
Date:
July, 2008
File:
PDF, 809 KB
english, 2008
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