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High-Resolution 19 F MAS NMR Spectroscopy of Fluorocarbon Films from Pulsed PECVD of Hexafluoropropylene Oxide
Lau, Kenneth K. S., Gleason, Karen K.Volume:
102
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp981240s
Date:
July, 1998
File:
PDF, 115 KB
english, 1998