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Predeposition Chemistry Underlying the Formation of Germanium Films by CVD of Tetravinylgermane
Harrison, Philip G., de Cointet, Chantal, Podesta, David M., Mazerolles, Pierre, Morancho, Roland, Reynes, Alex, Ograb, DjarollaVolume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00046a010
Date:
October, 1994
File:
PDF, 680 KB
english, 1994