Low-temperature synthesis of microcrystalline 3C-SiC film...

Journal of Physics D Applied Physics 2011 / 06 Vol. 44; Iss. 23

Low-temperature synthesis of microcrystalline 3C-SiC film by high-pressure hydrogen-plasma-enhanced chemical transport

Ohmi, Hiromasa, Hori, Takahiro, Mori, Tetsuya, Kakiuchi, Hiroaki, Yasutake, Kiyoshi
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Volume:
44
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/44/23/235202
Date:
June, 2011
File:
PDF, 645 KB
english, 2011
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