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Preparation of Ultra Low-κ Porous SiOCH Films from Ring-Type Siloxane with Unsaturated Hydrocarbon Side Chains by Spin-On Deposition
Chun-Xiao, Yang, Chi, Zhang, Qing-Qing, Sun, Sai-Sheng, Xu, Li-Feng, Zhang, Yu, Shi, Shi-Jin, Ding, Wei, ZhangVolume:
27
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/27/2/027701
Date:
February, 2010
File:
PDF, 596 KB
english, 2010