Micro-structuring of thick NdFeB films using high-power plasma etching for magnetic MEMS application
Jiang, Yonggang, Masaoka, Shingo, Uehara, Minoru, Fujita, Takayuki, Higuchi, Kohei, Maenaka, KazusukeVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/4/045011
Date:
April, 2011
File:
PDF, 921 KB
english, 2011