Self-Limiting Film Growth of Transparent Conducting In 2 O 3 by Atomic Layer Deposition using Trimethylindium and Water Vapor
Lee, Do-Joong, Kwon, Jang-Yeon, Lee, Jae Il, Kim, Ki-BumVolume:
115
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp2024389
Date:
August, 2011
File:
PDF, 3.55 MB
english, 2011