Silicon micromachining for millimeter-wave applications
Guillon, B., Grenier, K., Pons, P., Cazaux, J. L., Lalaurie, J. C., Cros, D., Plana, R.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582170
File:
PDF, 573 KB
english, 2000