Extremely Transparent and Conductive ZnO:Al Thin Films Prepared by Photo-Assisted Metalorganic Chemical Vapor Deposition (photo-MOCVD) Using AlCl3(6H2O) as New Doping Material
Myong, Seung Yeop, Baik, Seung Jae, Lee, Chang Hyun, Cho, Woo Young, Lim, Koeng SuVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L1078
Date:
August, 1997
File:
PDF, 966 KB
1997