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Magnetron Sputtering Deposition of Conductive Diamond-Like Carbon Films with Embedded Nanoparticles
Sasaki, Koichi, Tsutsumi, Takahiko, Takada, NoriharuVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08KE05
Date:
August, 2011
File:
PDF, 749 KB
english, 2011