[IEEE 2014 IEEE 27th International Conference on Micro...

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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - In-plane capacitive MEMS flow sensor for low-cost metering of flow velocity in natural gas pipelines

Nguyen, Son D., Paprotny, Igor, Wright, Paul K., White, Richard M.
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Year:
2014
Language:
english
DOI:
10.1109/MEMSYS.2014.6765805
File:
PDF, 1.17 MB
english, 2014
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