Regeneration of Pyrolyzed Photoresist Film by Heat...

Analytical Chemistry 2011 / 03 Vol. 83; Iss. 6

Regeneration of Pyrolyzed Photoresist Film by Heat Treatment

Gross, Andrew J., Downard, Alison J.
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Volume:
83
Language:
english
Journal:
Analytical Chemistry
DOI:
10.1021/ac103264v
Date:
March, 2011
File:
PDF, 2.44 MB
english, 2011
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