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Role of Gas Doping Sequence in Surface Reactions and Dopant Incorporation during Atomic Layer Deposition of Al-Doped ZnO
Na, Jeong-Seok, Peng, Qing, Scarel, Giovanna, Parsons, Gregory N.Volume:
21
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm901404p
Date:
December, 2009
File:
PDF, 1.91 MB
english, 2009