Maskless Surface Patterning of AlGaInP Light-Emitting Diodes by Photochemical Laser Interference Etching
Lin, Guanjun, Zuo, Zhiyuan, Liu, Duo, Feng, Zhaobin, Zhang, Qian, Lin, Xiaoyu, Xu, XiangangVolume:
117
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp407477h
Date:
December, 2013
File:
PDF, 3.49 MB
english, 2013