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Identification of Process Induced Defects in Silicon Power Devices
Astrova, E.V., Kozlov, V.A., Lebedev, A.A., Voronkov, V.B.Volume:
69-70
Year:
1999
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.69-70.539
File:
PDF, 405 KB
1999