Use of ionic liquids in SIMS depth profiling

Surface and Interface Analysis 2014 / 11 Vol. 46; Iss. S1

Use of ionic liquids in SIMS depth profiling

Nakata, Yoshihiko, Fujiyama, Noriyuki, Sameshima, Junichiro, Yoshikawa, Masanobu
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Volume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5655
Date:
November, 2014
File:
PDF, 574 KB
english, 2014
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